<layer_builder>
    <process_name>lumfoundry</process_name>
    <gds_ref_frame sidewall_angle_pos_ind="0" />
    <material name="Si_Palik">
        <optical name="Si_Palik">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</optical>
        <electrical name="Si (Silicon)">[encoded data, 23296 characters]</electrical>
        <thermal name="Si (Silicon)">[encoded data, 6660 characters]</thermal>
    </material>
    <material name="Si_np">
        <optical name="Si_np">[encoded data, 31928 characters]</optical>
        <electrical name="Si (Silicon)">[encoded data, 23288 characters]</electrical>
        <thermal name="Si (Silicon)">[encoded data, 6652 characters]</thermal>
    </material>
    <material name="Si3N4_Luke">
        <optical name="Si3N4_Luke">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</optical>
    </material>
    <material name="Al_CRC">
        <optical name="Al_CRC">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</optical>
        <electrical name="Al (Aluminium) - CRC">[encoded data, 20820 characters]</electrical>
        <thermal name="Al (Aluminium) - CRC">[encoded data, 6460 characters]</thermal>
    </material>
    <material name="SiO2_Palik">
        <optical name="SiO2_Palik">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</optical>
        <electrical name="SiO2 (Glass) - Sze">[encoded data, 21124 characters]</electrical>
        <thermal name="SiO2 (Glass) - Sze">[encoded data, 6528 characters]</thermal>
    </material>
    <layers>
        <layer layer_name="88:0" pattern_material_index="0" thickness="2.2e-07" background_alpha="0.29999999999999999" enabled="1" pattern_material="Si_Palik" start_position="0" material="" pattern_growth_delta="0" pattern_alpha="0.80000000000000004" name="Strip" start_position_auto="0" strain_value="0" material_index="0" process="Grow" sidewall_angle="90"/>
        <layer layer_name="89:0" pattern_material_index="0" thickness="1.1e-07" background_alpha="0.29999999999999999" enabled="1" pattern_material="Si_np" start_position="0" material="" pattern_growth_delta="0" pattern_alpha="0.80000000000000004" name="Rib" start_position_auto="0" strain_value="0" material_index="0" process="Grow" sidewall_angle="90"/>
        <layer layer_name="0:0" pattern_material_index="0" thickness="5e-07" background_alpha="0.29999999999999999" enabled="1" pattern_material="Si3N4_Luke" start_position="0" material="" pattern_growth_delta="0" pattern_alpha="0.80000000000000004" name="RibSi3N4" start_position_auto="0" strain_value="0" material_index="0" process="Grow" sidewall_angle="90"/>
        <layer layer_name="1:0" pattern_material_index="0" thickness="1.5e-07" background_alpha="0.29999999999999999" enabled="1" pattern_material="Si3N4_Luke" start_position="0" material="" pattern_growth_delta="0" pattern_alpha="0.80000000000000004" name="StripSi3N4" start_position_auto="0" strain_value="0" material_index="0" process="Grow" sidewall_angle="90"/>
        <layer layer_name="95:0" pattern_material_index="0" thickness="1.5e-07" background_alpha="0.29999999999999999" enabled="1" pattern_material="Al_CRC" start_position="3.5000000000000004e-07" material="" pattern_growth_delta="0" pattern_alpha="0.80000000000000004" name="heater" start_position_auto="0" strain_value="0" material_index="0" process="Grow" sidewall_angle="90"/>
        <layer layer_name="8:0" pattern_material_index="0" thickness="2.1e-06" background_alpha="0.29999999999999999" enabled="1" pattern_material="Al_CRC" start_position="2.0000000000000003e-06" material="" pattern_growth_delta="0" pattern_alpha="0.80000000000000004" name="m1" start_position_auto="0" strain_value="0" material_index="0" process="Grow" sidewall_angle="90"/>
        <layer layer_name="7:0" pattern_material_index="0" thickness="2.01e-06" background_alpha="0.29999999999999999" enabled="1" pattern_material="Al_CRC" start_position="2.1000000000000011e-07" material="" pattern_growth_delta="0" pattern_alpha="0.80000000000000004" name="cont" start_position_auto="0" strain_value="0" material_index="0" process="Grow" sidewall_angle="90"/>
        <layer layer_name="None" pattern_material_index="0" thickness="-1e-05" background_alpha="0.29999999999999999" enabled="1" pattern_material="" start_position="-2.0000000000000003e-06" material="Si_Palik" pattern_growth_delta="0" pattern_alpha="0.80000000000000004" name="Si_Substrate" start_position_auto="0" strain_value="0" material_index="0" process="Background" sidewall_angle="90"/>
        <layer layer_name="None" pattern_material_index="0" thickness="2e-06" background_alpha="0.29999999999999999" enabled="1" pattern_material="" start_position="-2.0000000000000003e-06" material="SiO2_Palik" pattern_growth_delta="0" pattern_alpha="0.80000000000000004" name="BOX" start_position_auto="0" strain_value="0" material_index="0" process="Background" sidewall_angle="90"/>
        <layer layer_name="None" pattern_material_index="0" thickness="3.42e-06" background_alpha="0.29999999999999999" enabled="1" pattern_material="" start_position="0" material="SiO2_Palik" pattern_growth_delta="0" pattern_alpha="0.80000000000000004" name="TOX" start_position_auto="0" strain_value="0" material_index="0" process="Background" sidewall_angle="90"/>
    </layers>
    <doping_layers>
        <layer straggle="2.9999999999999997e-08" dopant="p" distribution_function="Gaussian" enabled="1" applicable_layer_name="None" lateral_scatter="2.9999999999999997e-08" kurtosis="0" z_surface_positions="2.2000000000000001e-07" concentration="1e+17" range="4.9999999999999998e-08" name="pim" skewness="0" mask_layer_number="91:0" process="Implant" theta="0" phi="0"/>
        <layer straggle="2.9999999999999997e-08" dopant="n" distribution_function="Gaussian" enabled="1" applicable_layer_name="None" lateral_scatter="2.9999999999999997e-08" kurtosis="0" z_surface_positions="2.2000000000000001e-07" concentration="1e+17" range="4.9999999999999998e-08" name="nim" skewness="0" mask_layer_number="90:0" process="Implant" theta="0" phi="0"/>
        <layer straggle="8.9999999999999999e-08" dopant="p" distribution_function="Gaussian" enabled="1" applicable_layer_name="None" lateral_scatter="5.0000000000000001e-09" kurtosis="0" z_surface_positions="1.1000000000000001e-07" concentration="1e+19" range="4.4999999999999999e-08" name="pplus" skewness="0" mask_layer_number="4:0" process="Implant" theta="0" phi="0"/>
        <layer straggle="8.9999999999999999e-08" dopant="n" distribution_function="Gaussian" enabled="1" applicable_layer_name="None" lateral_scatter="5.0000000000000001e-09" kurtosis="0" z_surface_positions="1.1000000000000001e-07" concentration="1e+19" range="4.4999999999999999e-08" name="nplus" skewness="0" mask_layer_number="5:0" process="Implant" theta="0" phi="0"/>
        <layer straggle="8.9999999999999999e-08" dopant="p" distribution_function="Gaussian" enabled="1" applicable_layer_name="None" lateral_scatter="5.0000000000000001e-09" kurtosis="0" z_surface_positions="1.1000000000000001e-07" concentration="1e+19" range="4.4999999999999999e-08" name="ppp" skewness="0" mask_layer_number="93:0" process="Implant" theta="0" phi="0"/>
        <layer straggle="8.9999999999999999e-08" dopant="n" distribution_function="Gaussian" enabled="1" applicable_layer_name="None" lateral_scatter="5.0000000000000001e-09" kurtosis="0" z_surface_positions="1.1000000000000001e-07" concentration="1e+19" range="4.4999999999999999e-08" name="npp" skewness="0" mask_layer_number="92:0" process="Implant" theta="0" phi="0"/>
        <layer straggle="0" dopant="p" distribution_function="Gaussian" enabled="1" applicable_layer_name="None" lateral_scatter="0" kurtosis="0" z_surface_positions="3.4199999999999999e-06" concentration="1000000000000000" range="1.342e-05" name="Wafer" skewness="0" mask_layer_number="None" process="Background" theta="0" phi="0"/>
    </doping_layers>
    <process_variation>
       <statistical name="statistical_1">
          <pattern name="hard_mask_bias" distribution="(normal,5e-9)" delta="0"
        pattern_growth_delta="0 0 1 0 0 0 0"/>
          <stack name="si_thickness" distribution="(normal,7e-9)" delta="0"
        thickness="0 0 1 1 0 0 0"
        start_position="0 0 0 0 1 0 0"/>
        </statistical>
    </process_variation>
</layer_builder>